[P-1-11] Nucleation and Growth Control of Al-CVD for Dual-Damascene Application

T. Iino, M. Sugiyama, H. Itoh, J. Aoyama, H. Komiyama, Y. Shimogaki (1.Department of Materials Engineering, University of Tokyo, 2.Department of Chemical System Engineering, University of Tokyo, 3.Semiconductor Technology Academic Research Center)

https://doi.org/10.7567/SSDM.2001.P-1-11