[P-1-13] Development of New Tight-Binding Molecular Dynamics Program to Simulate Chemical-Mechanical Polishing Processes
Toshiyuki Yokosuka, Hitoshi Kurokawa, Seiichi Takami, Momoji Kubo, Akira Miyamoto, Akira Imamura
(1.Department of Materials Chemistry, Graduated School of Engineering, Tohoku University, 2.Department of Mathematics, Faculty of Engineering, Hiroshima Kokusai Gakuin University)
https://doi.org/10.7567/SSDM.2001.P-1-13