The Japan Society of Applied Physics

[A-8-4] A Technology of reducing Flicker Noise for ULSI applications

Koutarou Tanaka, Kazufumi Watanabe, Hideki Ishino, Shigetoshi Sugawa, Akinoubu Teramoto Masaki Hirayama, Tadahiro Ohmi (1.Management of Science & Technology Department Graduate School of Engineering, Tohoku University, 2.Department of Electronic Engineering, Graduate school of Engineering, Tohoku University, 3.New Industry Creation Hatchery Center, Tohoku University)

https://doi.org/10.7567/SSDM.2002.A-8-4