The Japan Society of Applied Physics

[B-1-5] A Theoretical Study of SiO2-rich Zr and Hf Silicates as High-k Gate Insulators

Tomoyuki Hamada、Takuya Maruizumi、Yuuichi Matsui、Masahiko Hiratani (1.Advanced Research Laboratory, Hitachi Ltd.、2.Central Research Laboratory, Hitachi, Ltd.)

https://doi.org/10.7567/SSDM.2002.B-1-5