[B-2-3] Effect of TEOS treatment on the properties of periodic nanoporous silica low-k film
Yoshiaki Oku, Kazuhiro Yamada, Norikazu Nishiyama, Shunsuke Tanaka, Korekazu Ueyama, Nobuhiro Hata, Takamaro Kikkawa
(1.MIRAI Project, ASET, 2.Graduate School of Engineering Science, Osaka University, 3.MIRAI Project, ASRC, AIST, 4.RCNS, Hiroshima University)
https://doi.org/10.7567/SSDM.2002.B-2-3
