[B-4-2] Stress-Induced Migration and Microstructural Features in Cu Metallization

J. Koike、A. Sekiguchi、M. Wada、R. Kainuma、K. Ishida、K. Maruyama (1.Dept. of Materials Science, Tohoku University)

https://doi.org/10.7567/SSDM.2002.B-4-2