[B-4-2] Stress-Induced Migration and Microstructural Features in Cu Metallization

J. Koike, A. Sekiguchi, M. Wada, R. Kainuma, K. Ishida, K. Maruyama (1.Dept. of Materials Science, Tohoku University)

https://doi.org/10.7567/SSDM.2002.B-4-2