[B-4-3] Chemical Structural Control of Plasma-Polymerized, Divinylsiloxane Benzocyclobutene Films for sub 100nm-node ULSI devices

Y. Harada、M. Tada、J. Kawahara、Y. Hayashi (1.Silicon Systems Research Laboratories, NEC Corporation)

https://doi.org/10.7567/SSDM.2002.B-4-3