Implementation of electrically programmable fuse (eFUSE) in CMOS technologies using electromigration

S. Sundar Kumar Iyer; C. Kothandaraman; Norman Robson; Danny Shum; James P. Rice; Subramanian S. Iyer

doi:https://doi.org/10.7567/SSDM.2002.B-4-4

[B-4-4] Implementation of electrically programmable fuse (eFUSE) in CMOS technologies using electromigration

S. Sundar Kumar Iyer、C. Kothandaraman、Norman Robson、Danny Shum、James P. Rice、Subramanian S. Iyer (1.IBM Microelectronics, Semiconductor R&D Centre、2.Infineon Technologies Corp.)

https://doi.org/10.7567/SSDM.2002.B-4-4

2002 International Conference on Solid State Devices and Materials

[B-4-4] Implementation of electrically programmable fuse (eFUSE) in CMOS technologies using electromigration