[B-6-2] Influence of Ge and C for reaction in Ni/p+-Si1-x-yGexCy/Si(100) contacts

Yoshinori Tsuchiya, Osamu Nakatsuka, Akira Sakai, Shigeaki Zaima, Junichi Murota, Yukio Yasuda (1.Graduate School of Engineering, Nagoya University, 2.Center for Integrated Research in Science and Engineering, Nagoya University, 3.Center of Cooperative Research in Advanced Science and Technology, Nagoya University, 4.Research Institute of Electrical Communication, Tohoku University)

https://doi.org/10.7567/SSDM.2002.B-6-2