[B-7-2] Characterization of Ultra Thin Oxynitride Formed by Radical Nitridation with Slot Plane Antenna Plasma

Takuya Sugawara, Toshio Nakanishi, Masaru Sasaki, Shigenori Ozaki, Yoshihide Tada (1.Tokyo Electron Ltd, Technology Development Center, 2.Tokyo Electron Ltd, Kansai Technology Center)

https://doi.org/10.7567/SSDM.2002.B-7-2