[B-7-4] Electrical Characteristics of Rare Earth Gate Oxides Improved by Chemical Oxide and Long Low Temperature Annealing

S. Ohmi, I. Kashiwagi, C. Ohshima, J. Taguchi, H. Yamamoto, J. Tonotani, H. Ishiwara, H. Iwai (1.Tokyo Institute of Technology)

https://doi.org/10.7567/SSDM.2002.B-7-4