[B-7-4] Electrical Characteristics of Rare Earth Gate Oxides Improved by Chemical Oxide and Long Low Temperature Annealing

S. Ohmi、I. Kashiwagi、C. Ohshima、J. Taguchi、H. Yamamoto、J. Tonotani、H. Ishiwara、H. Iwai (1.Tokyo Institute of Technology)

https://doi.org/10.7567/SSDM.2002.B-7-4