[B-8-3] Evaluation of Surface Contamination by Noncontact Capacitance Method under UV Irradiation

Motohiro Kohno, Toshikazu Kitajima, Sadao Hirae, Shin Yokoyama (1.Development Department, Dainippon Screen Manufacturing Co., Ltd., 2.Research Center for Nanodevices and Systems, Hiroshima University)

https://doi.org/10.7567/SSDM.2002.B-8-3