[B-9-2] Investigation of the Ti-Doped Ta2O5 Films from PET and TET Cocktail Source for DRAM Capacitor

K. J. Nam、K. C. Kim、J. S. Lim、K. V. Lim、Y. S. Kim、S. T. Kim、U. I. Chung、J. T. Moon (1.Process Development Team, Semiconductor R&D Center, Samsung Electronics Co. Ltd.)

https://doi.org/10.7567/SSDM.2002.B-9-2