2002 International Conference on Solid State Devices and Materials

Sep 17, 2002 - Sep 19, 2002
Nagoya Congress Center, Nagoya, Japan

[C-1-1] Advanced Electron Microscopy Characterization of Semiconductor Surface and Interface Processes

Rudolf M. Tromp (1.IBM T.J. Watson Research Center)

https://doi.org/10.7567/SSDM.2002.C-1-1

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