[C-1-2] A Novel TEM/AFM/STM Microscopy for Cu Nano-Wire Electromigration

Satoru FUJISAWA, Takamaro KIKKAWA, Tokushi KIZUKA (1.MIRAI Project, Advanced Semiconductor Research Center (ASRC), National Institute of Advanced Industrial Science and Technology (AIST), 2.Research Center for Nanodevices and Systems, Hiroshima University, 3.Institute of Materials Science, University of Tsukuba)

https://doi.org/10.7567/SSDM.2002.C-1-2