[C-2-3] Water Absorption into ALD-Al2O3 Films as revealed by Physical Analysis and Electrical Characterization

Masaru Kadoshima, Masayasu Nishizawa, Tetsuji Yasuda, Toshihide Nabatame, Akira Toriumi (1.MIRAI Project, Association of Super-Advanced Electronics Technologies (ASET), 2.MIRAI Project, Advanced Semiconductor Research Center (ASRC), National Institute of Advanced Industrial Science and Technology (AIST), 3.Department of Materials Science School of Engineering, University of Tokyo)

https://doi.org/10.7567/SSDM.2002.C-2-3