[C-2-3] Water Absorption into ALD-Al2O3 Films as revealed by Physical Analysis and Electrical Characterization

Masaru Kadoshima、Masayasu Nishizawa、Tetsuji Yasuda、Toshihide Nabatame、Akira Toriumi (1.MIRAI Project, Association of Super-Advanced Electronics Technologies (ASET)、2.MIRAI Project, Advanced Semiconductor Research Center (ASRC), National Institute of Advanced Industrial Science and Technology (AIST)、3.Department of Materials Science School of Engineering, University of Tokyo)

https://doi.org/10.7567/SSDM.2002.C-2-3