[C-2-5] New Method for Characterizing Dielectric Properties of High-k Films Using Time-Dependent Open-Circuit Potential Measurement

Koji Kita、Masashi Sasagawa、Kentaro Kyuno、Akira Toriumi (1.Department of Materials Science, Graduate School of Engineering, The University of Tokyo)

https://doi.org/10.7567/SSDM.2002.C-2-5