Metal-induced solid-phase crystallization of amorphous SiGe films on insulator

Hiroshi Kanno; Isao Tsunoda; Atsushi Kenjo; Taizoh Sadoh; Shinya Yamaguchi; Masanobu Miyao

doi:https://doi.org/10.7567/SSDM.2002.C-9-2

2002 International Conference on Solid State Devices and Materials

2002年9月17日〜 2002年9月19日
Nagoya Congress Center, Nagoya, Japan

[C-9-2] Metal-induced solid-phase crystallization of amorphous SiGe films on insulator

Hiroshi Kanno、Isao Tsunoda、Atsushi Kenjo、Taizoh Sadoh、Shinya Yamaguchi、Masanobu Miyao (1.Department of Electronics, Kyushu University、2.Central Research Lab., Hitachi Ltd.)

https://doi.org/10.7567/SSDM.2002.C-9-2

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