The Japan Society of Applied Physics

[C-9-2] Metal-induced solid-phase crystallization of amorphous SiGe films on insulator

Hiroshi Kanno、Isao Tsunoda、Atsushi Kenjo、Taizoh Sadoh、Shinya Yamaguchi、Masanobu Miyao (1.Department of Electronics, Kyushu University、2.Central Research Lab., Hitachi Ltd.)

https://doi.org/10.7567/SSDM.2002.C-9-2