[C-9-2] Metal-induced solid-phase crystallization of amorphous SiGe films on insulator
Hiroshi Kanno、Isao Tsunoda、Atsushi Kenjo、Taizoh Sadoh、Shinya Yamaguchi、Masanobu Miyao
(1.Department of Electronics, Kyushu University、2.Central Research Lab., Hitachi Ltd.)
https://doi.org/10.7567/SSDM.2002.C-9-2