Metal-induced solid-phase crystallization of amorphous SiGe films on insulator

Hiroshi Kanno; Isao Tsunoda; Atsushi Kenjo; Taizoh Sadoh; Shinya Yamaguchi; Masanobu Miyao

doi:https://doi.org/10.7567/SSDM.2002.C-9-2

2002 International Conference on Solid State Devices and Materials

Sep 17, 2002 - Sep 19, 2002
Nagoya Congress Center, Nagoya, Japan

[C-9-2] Metal-induced solid-phase crystallization of amorphous SiGe films on insulator

Hiroshi Kanno, Isao Tsunoda, Atsushi Kenjo, Taizoh Sadoh, Shinya Yamaguchi, Masanobu Miyao (1.Department of Electronics, Kyushu University, 2.Central Research Lab., Hitachi Ltd.)

https://doi.org/10.7567/SSDM.2002.C-9-2

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