Control of 2 type Dielectric Relaxation Current of Ta2O5 Metal-Insulator-Metal[MIM]Capacitors

Masahiro Kiyotoshi; Katsuhiko Hieda; Yoshiaki Fukuzumi; Yusuke Kohyama; Toshiya Suzuki; Daisuke Matsunaga; Koichi Hashimoto

doi:https://doi.org/10.7567/SSDM.2002.C-9-4

2002 International Conference on Solid State Devices and Materials

Sep 17, 2002 - Sep 19, 2002
Nagoya Congress Center, Nagoya, Japan

[C-9-4] Control of 2 type Dielectric Relaxation Current of Ta2O5 Metal-Insulator-Metal[MIM]Capacitors

Masahiro Kiyotoshi, Katsuhiko Hieda, Yoshiaki Fukuzumi, Yusuke Kohyama, Toshiya Suzuki, Daisuke Matsunaga, Koichi Hashimoto (1.Toshiba Corporation, 2.Fujitsu Limited)

https://doi.org/10.7567/SSDM.2002.C-9-4

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