Advanced Depleted-Substrate Transistors: Single-gate, Double-gate and Tri-gate

Robert Chau; Brian Doyle; Jack Kavalieros; Doug Barlage; Anand Murthy; Mark Doczy; Reza Arghavani; Suman Datta

doi:https://doi.org/10.7567/SSDM.2002.D-1-1

2002 International Conference on Solid State Devices and Materials

Sep 17, 2002 - Sep 19, 2002
Nagoya Congress Center, Nagoya, Japan

[D-1-1] Advanced Depleted-Substrate Transistors: Single-gate, Double-gate and Tri-gate

Robert Chau, Brian Doyle, Jack Kavalieros, Doug Barlage, Anand Murthy, Mark Doczy, Reza Arghavani, Suman Datta (1.Components Research, Logic Technology Development, Intel Corporation)

https://doi.org/10.7567/SSDM.2002.D-1-1

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