The Japan Society of Applied Physics

[D-1-1] Advanced Depleted-Substrate Transistors: Single-gate, Double-gate and Tri-gate

Robert Chau、Brian Doyle、Jack Kavalieros、Doug Barlage、Anand Murthy、Mark Doczy、Reza Arghavani、Suman Datta (1.Components Research, Logic Technology Development, Intel Corporation)

https://doi.org/10.7567/SSDM.2002.D-1-1