The Japan Society of Applied Physics

[F-3-2] On-Chip Variable Inductor Using MEMS Technology

Yoshisato Yokoyama, Takashi Fukushige, Seiichi Hata, Kazuya Masu, Akira Shimokohbe (1.Precision and Intelligence Laboratory, Tokyo Institute of Technology)

https://doi.org/10.7567/SSDM.2002.F-3-2