[F-3-2] On-Chip Variable Inductor Using MEMS Technology
Yoshisato Yokoyama, Takashi Fukushige, Seiichi Hata, Kazuya Masu, Akira Shimokohbe
(1.Precision and Intelligence Laboratory, Tokyo Institute of Technology)
https://doi.org/10.7567/SSDM.2002.F-3-2