On-Chip Variable Inductor Using MEMS Technology

Yoshisato Yokoyama; Takashi Fukushige; Seiichi Hata; Kazuya Masu; Akira Shimokohbe

doi:https://doi.org/10.7567/SSDM.2002.F-3-2

2002 International Conference on Solid State Devices and Materials

Sep 17, 2002 - Sep 19, 2002
Nagoya Congress Center, Nagoya, Japan

[F-3-2] On-Chip Variable Inductor Using MEMS Technology

Yoshisato Yokoyama, Takashi Fukushige, Seiichi Hata, Kazuya Masu, Akira Shimokohbe (1.Precision and Intelligence Laboratory, Tokyo Institute of Technology)

https://doi.org/10.7567/SSDM.2002.F-3-2

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