MEMS Based Nanotools for Detection and Manipulation at the Molecular Level

U. Staufer; L. Aeschimann; T. Akiyama; S. Gautsch; N. F. de Rooij

doi:https://doi.org/10.7567/SSDM.2002.F-5-1

2002 International Conference on Solid State Devices and Materials

Sep 17, 2002 - Sep 19, 2002
Nagoya Congress Center, Nagoya, Japan

[F-5-1] MEMS Based Nanotools for Detection and Manipulation at the Molecular Level

U. Staufer, L. Aeschimann, T. Akiyama, S. Gautsch, N. F. de Rooij (1.Sensors, Actuators and Microsystems Laboratory (SAMLAB) Institute of Microtechnology, University of Neuchatel)

https://doi.org/10.7567/SSDM.2002.F-5-1

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