The Japan Society of Applied Physics

[F-5-1] MEMS Based Nanotools for Detection and Manipulation at the Molecular Level

U. Staufer, L. Aeschimann, T. Akiyama, S. Gautsch, N. F. de Rooij (1.Sensors, Actuators and Microsystems Laboratory (SAMLAB) Institute of Microtechnology, University of Neuchatel)

https://doi.org/10.7567/SSDM.2002.F-5-1