[F-5-3] Electrostatically Levitated Ring-Shaped Rotational-Gyro/Accelerometer
T. Murakoshi, K. Fukatsu, Y. Endo, S. Nakamura, M. Esashi
(1.TOKIMEC INC., 2.Tohoku University, New Industry Creation Hatchery Center)
https://doi.org/10.7567/SSDM.2002.F-5-3
