[F-5-3] Electrostatically Levitated Ring-Shaped Rotational-Gyro/Accelerometer

T. Murakoshi、K. Fukatsu、Y. Endo、S. Nakamura、M. Esashi (1.TOKIMEC INC.、2.Tohoku University, New Industry Creation Hatchery Center)

https://doi.org/10.7567/SSDM.2002.F-5-3