[F-5-4] Multichannel 5×5-site 3D Si Micro-Probe Electrode Array for Neural Activity Recording System

Takeshi Kawano、Hidekuni Takao、Kazuaki Sawada、Makoto Ishida (1.Department of Electrical and Electronic Engineering Toyohashi University of Technology)

https://doi.org/10.7567/SSDM.2002.F-5-4