Multichannel 5×5-site 3D Si Micro-Probe Electrode Array for Neural Activity Recording System

Takeshi Kawano; Hidekuni Takao; Kazuaki Sawada; Makoto Ishida

doi:https://doi.org/10.7567/SSDM.2002.F-5-4

2002 International Conference on Solid State Devices and Materials

Sep 17, 2002 - Sep 19, 2002
Nagoya Congress Center, Nagoya, Japan

[F-5-4] Multichannel 5×5-site 3D Si Micro-Probe Electrode Array for Neural Activity Recording System

Takeshi Kawano, Hidekuni Takao, Kazuaki Sawada, Makoto Ishida (1.Department of Electrical and Electronic Engineering Toyohashi University of Technology)

https://doi.org/10.7567/SSDM.2002.F-5-4

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