Fabrication of AlGaN/GaN Quantum Wires by ECR-RIBE Process and Their Electrical Properties

Tsutomu Muranaka; Zhi Jin; Makoto Endo; Tamotsu Hashizume; Hideki Hasegawa

doi:https://doi.org/10.7567/SSDM.2002.F-7-3

[F-7-3] Fabrication of AlGaN/GaN Quantum Wires by ECR-RIBE Process and Their Electrical Properties

Tsutomu Muranaka、Zhi Jin、Makoto Endo、Tamotsu Hashizume、Hideki Hasegawa (1.Research Center for Integrated Quantum Electronics and Graduate School of Electronics and Information Engineering, Hokkaido University)

https://doi.org/10.7567/SSDM.2002.F-7-3

2002 International Conference on Solid State Devices and Materials

[F-7-3] Fabrication of AlGaN/GaN Quantum Wires by ECR-RIBE Process and Their Electrical Properties