Fabrication of AlGaN/GaN Quantum Wires by ECR-RIBE Process and Their Electrical Properties

Tsutomu Muranaka; Zhi Jin; Makoto Endo; Tamotsu Hashizume; Hideki Hasegawa

doi:https://doi.org/10.7567/SSDM.2002.F-7-3

[F-7-3] Fabrication of AlGaN/GaN Quantum Wires by ECR-RIBE Process and Their Electrical Properties

Tsutomu Muranaka, Zhi Jin, Makoto Endo, Tamotsu Hashizume, Hideki Hasegawa (1.Research Center for Integrated Quantum Electronics and Graduate School of Electronics and Information Engineering, Hokkaido University)

https://doi.org/10.7567/SSDM.2002.F-7-3

2002 International Conference on Solid State Devices and Materials

[F-7-3] Fabrication of AlGaN/GaN Quantum Wires by ECR-RIBE Process and Their Electrical Properties