2002 International Conference on Solid State Devices and Materials

Sep 17, 2002 - Sep 19, 2002
Nagoya Congress Center, Nagoya, Japan

[G-1-1] Mass Production Technology of MOVPE for InP, GaN and Progressed GaAs Related Materials

Yohei Otoki, Shinjiro Fujio (1.Semiconductor Engineering Dept., Hitachi Cable)

https://doi.org/10.7567/SSDM.2002.G-1-1

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