[G-4-2] Correlation between Fe-Zn inter-diffusion observed by scanning capacitance microscopy and device characteristics of electro-absorption modulators

M. Ogasawara、R. Iga、S. Kondo、Y. Kondo (1.NTT Photonics Laboratories)

https://doi.org/10.7567/SSDM.2002.G-4-2