[G-4-2] Correlation between Fe-Zn inter-diffusion observed by scanning capacitance microscopy and device characteristics of electro-absorption modulators

M. Ogasawara, R. Iga, S. Kondo, Y. Kondo (1.NTT Photonics Laboratories)

https://doi.org/10.7567/SSDM.2002.G-4-2