[G-8-1] ZrB2 Substrate for Nitride Semiconductors

Hiroyuki Kinoshita、Shigeki Otani、Satoshi Kamiyama、Hiroshi Amano、Isamu Akasaki、Jun Suda、Hiroyuki Matsunami (1.Kyocera Corporation Youkaichi Plant、2.National Institute for Material Science, Advanced Materials Laboratory、3.Faculty of Science and Technology, High-Tech Research Center, Meijo University、4.Department of Electronic Science and Engineering, Kyoto University)

https://doi.org/10.7567/SSDM.2002.G-8-1