[G-8-1] ZrB2 Substrate for Nitride Semiconductors

Hiroyuki Kinoshita, Shigeki Otani, Satoshi Kamiyama, Hiroshi Amano, Isamu Akasaki, Jun Suda, Hiroyuki Matsunami (1.Kyocera Corporation Youkaichi Plant, 2.National Institute for Material Science, Advanced Materials Laboratory, 3.Faculty of Science and Technology, High-Tech Research Center, Meijo University, 4.Department of Electronic Science and Engineering, Kyoto University)

https://doi.org/10.7567/SSDM.2002.G-8-1