[G-8-2] Thin GaN on Sapphire with Reduced Bowing by Large Area Laser Lift-off Technique

Masahiro Ishida、Tetsuzo Ueda、Masaaki Yuri (1.Semiconductor Devices Research Center, Semiconductor Company, Matsushita Electric Industrial Co., Ltd.)

https://doi.org/10.7567/SSDM.2002.G-8-2