Fabrication and characterization of thin film spiral inductors toward a realization of variable impedance devices

Hiroki Funato; Michihiko Suhara; Tsugunori Okumura

doi:https://doi.org/10.7567/SSDM.2002.LB-1-4

2002 International Conference on Solid State Devices and Materials

2002年9月17日〜 2002年9月19日
Nagoya Congress Center, Nagoya, Japan

[LB-1-4] Fabrication and characterization of thin film spiral inductors toward a realization of variable impedance devices

Hiroki Funato、Michihiko Suhara、Tsugunori Okumura (1.Department of Electrical Engineering, Graduate School of Engineering, Tokyo Metropolitan University)

https://doi.org/10.7567/SSDM.2002.LB-1-4

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