Fabrication and characterization of thin film spiral inductors toward a realization of variable impedance devices

Hiroki Funato; Michihiko Suhara; Tsugunori Okumura

doi:https://doi.org/10.7567/SSDM.2002.LB-1-4

[LB-1-4] Fabrication and characterization of thin film spiral inductors toward a realization of variable impedance devices

Hiroki Funato, Michihiko Suhara, Tsugunori Okumura (1.Department of Electrical Engineering, Graduate School of Engineering, Tokyo Metropolitan University)

https://doi.org/10.7567/SSDM.2002.LB-1-4

2002 International Conference on Solid State Devices and Materials

[LB-1-4] Fabrication and characterization of thin film spiral inductors toward a realization of variable impedance devices