[LF-1-3] MEMS device for controlling evanescent field on side polished optical fiber
JongHyeong Song、Yohei Taguchi、Minoru Sasaki、Kazuhiro Hane
(1.Department of Mechatronics and Precision Engineering, Tohoku University)
https://doi.org/10.7567/SSDM.2002.LF-1-3