The Japan Society of Applied Physics

2002 International Conference on Solid State Devices and Materials

2002 International Conference on Solid State Devices and Materials

Sep 17, 2002 - Sep 19, 2002
Nagoya Congress Center, Nagoya, Japan

[LF-1-3] MEMS device for controlling evanescent field on side polished optical fiber

JongHyeong Song, Yohei Taguchi, Minoru Sasaki, Kazuhiro Hane (1.Department of Mechatronics and Precision Engineering, Tohoku University)

https://doi.org/10.7567/SSDM.2002.LF-1-3