The Japan Society of Applied Physics

[LP3-1] Interaction of Cu with low-k plasma polymer films deposited by PECVD using decahydronaphthalene and tetraethylorthosilicate precursors

Cheonman Shim, Jaeyoung Yang, Seungman Jung, Munkyu Choi, Donggeun Jung (1.Department of Physics, Brain Korea 21 Physics Research Division, Institute of Basic Science, and Center for Nanotubes and Nanostructured Composites, Sungkyunkwan University)