[P10-5] Uniform and Reproducible MOCVD of Pb(Zr,Ti)O3 Thin Films on 8"φ Substrate for FeRAM Production
Takehito Jimbo, Masahiko Kajinuma, Takeshi Masuda, Takakazu Yamada, Hiroto Uchida, Masaki Uematsu, Koukou Suu, Michio Ishikawa
(1.ULVAC Inc., Institute for Semiconductor Technologies, 2.ULVAC Inc., Semiconductor Equipment Division 1)
https://doi.org/10.7567/SSDM.2002.P10-5
