The Japan Society of Applied Physics

[P11-1] DC and AC Characteristics of RPCVD Grown Modulation-doped SiGe pMOSFETs

Young-Joo Song、Jung-Wook Lim、Sang-Heung Lee、Hyun-Chul Bae、Jin-Young Kang、Kyung-Wan Park、Kyu-Hwan Shim (1.SiGe Device Team, Wireless Communication Device Research Division Electronics and Telecommunications Research Institute)

https://doi.org/10.7567/SSDM.2002.P11-1