[P11-1] DC and AC Characteristics of RPCVD Grown Modulation-doped SiGe pMOSFETs

Young-Joo Song, Jung-Wook Lim, Sang-Heung Lee, Hyun-Chul Bae, Jin-Young Kang, Kyung-Wan Park, Kyu-Hwan Shim (1.SiGe Device Team, Wireless Communication Device Research Division Electronics and Telecommunications Research Institute)

https://doi.org/10.7567/SSDM.2002.P11-1